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1．高速計(jì)數(shù)器概述
21點(diǎn)高速計(jì)數(shù)器C235～C255共用PLC的8個(gè)高速計(jì)數(shù)器輸入端X0～X7，某一輸入端同時(shí)只能供一個(gè)高速計(jì)數(shù)器使用。這21個(gè)計(jì)數(shù)器均為32位加/減計(jì)數(shù)器(見表3–7)。不同類型的高速計(jì)數(shù)器可以同時(shí)使用，但是它們的高速計(jì)數(shù)器輸入不能沖突。
高速計(jì)數(shù)器的運(yùn)行建立在中斷的基礎(chǔ)上，這意味著事件的觸發(fā)與掃描時(shí)間無關(guān)。在對(duì)外部高速脈沖計(jì)數(shù)時(shí)，梯形圖中高速計(jì)數(shù)器的線圈應(yīng)一直通電，以表示與它有關(guān)的輸入點(diǎn)已被使用，其他高速計(jì)數(shù)器的處理不能與它沖突。可用運(yùn)行時(shí)一直為ON的M8000的常開觸點(diǎn)來驅(qū)動(dòng)高速計(jì)數(shù)器的線圈。
例如在圖1中，當(dāng)X14為ON時(shí)，選擇了高速計(jì)數(shù)器C235，從表3–7可知，C235的計(jì)數(shù)輸入端是X0，但是它并不在程序中出現(xiàn)，計(jì)數(shù)信號(hào)不是X14提供的。
表1給出了各高速計(jì)數(shù)器對(duì)應(yīng)的輸入端子的元件號(hào)，表中的U、D分別為加、減計(jì)數(shù)輸入，A、B分別為A、B相輸入，R為復(fù)位輸入，S為置位輸入。
APPLIED MATERIALS 0200-05959, EinzelringQUARTZ, 09 Hhe, 12RECESSDBSH
APPLIED MATERIALS 0021-04258, Plattenhalter Aluminium
RIGAKU 4259B2, R2HVKabel
APPLIED MATERIALS 0021-04258, plate retainer aluminum
MKS 51A31TGA2BA015,Type 51A Mini Vacuum
5046996, 00000011040771, Roller
MID-AMERICA-PLASTICS426142-001
APPLIED MATERIALS 0200-20164, Isolator,Lampenabdeckung rechts
VOEGTLIN GCA-C9SA-FA25 red-y Massendurchflussmesser
APPLIED MATERIALS 0200-20162, Isolator,Lampenhohlraum rechts
MKS 141A-23030, Absolutdrucksensor
APPLIED MATERIALS 0200-20162, insulator
NORMA 114-4-1.2/612071-32/06 , GRIP E W2
3D05-350028-11 Insulator, ESC Encloser
MID-AMERICA-PLASTICS426141-001
APTech AP1010S 3 PWFV4 FV4 IV4, Regler+WIKA Manometer
Applied Materials CORONA-FRE 645-00078-00
MKS 901P-11040-0054 901P Loadlock Pressure
NORMA 128-4-2.5/505745-27/08 , GRIP E W2
Rigaku X-Ray Filament SFP7, D2H65E
NORMA 122-4-1.5/736002-14/08 , GRIP E W2
APPLIED MATERIALS 0020-99305, Halterung
VOEGTLIN GCR-C9SA-BA30
VOEGTLIN GCA-D9SA-FA95
APPLIED MATERIALS 0020-99305, bulkhead bracket
NORMA 118-4-1.5/502896-04/08 , GRIP E W2
APPLIED MATERIALS 0021-15008, Anoden Endpunktdetektor
Edwards C10516294 DN40KF Flexible Rohrleitung / NW40xNW40
APPLIED MATERIALS 0021-15008
ENTEGRIS 100197732,Ventil - HF N/C FT 1''
APTech Ventile / Valves AP4650/ 3550SM2DRU/ 124ISH3PL228
VOEGTLIN GCR-C9SS-FS25
VOEGTLIN GCR-C9SA-FA20
Rigaku Window 3199B012
MST Ho
neywell 9602-6100, Satellite XT Sensor (PH3) (2E) .05-1 ppm,
MST Ho
neywell 9602-6300, Satellite Sensor for Silane (SiH4)0-50 ppm
MST Ho
neywell 9602-5100, Satellite (1%)(H2) 0-1000 % vol.
APTech einstufiger Druckregler AK1210S 4PL 6 6
APTech Membran Handventil mit Anzeige AP3650S M 2PW FV4
APTech Ventil / Valve AP4650S M 2PW FV6FV4 ISH3 PL228
APTech Ventil / Valve AP4650S M 2PW FV6FV6 ISH3 PL228
ENTEGRIS 305322-004,202-124-01, 1/4''
LAM RESEARCH 839-802758-004 , 1001685, VVLDMT
ENTEGRIS PVT4-T4-2FN-1, 1/4'' Galtek Sperrhahn
LAM RESEARCH 839-802758-004 1001685, VVLDMT
ENTEGRIS 201-87, 1/4'' manuelles Membranventil
ENTEGRIS 100212364,1/4'' PFA Schlauch
LAM RESAERCH 715-078410-200
VARIAN E17042140, Ion Implant System
Rigaku RS-P1100 Filterpapier
APTech AZ1210S 2PW FV8 FV8
MID-AMERICA-PLASTICS413029-001
Celerity TransducerSS2, GFD00A4BSM, 30PSIA, 4 to 20mA
LAM RESEARCH 715-022645-003
APPLIED MATERIALS 0021-04258
APPLIED MATERIALS 0200-76041
APPLIED MATERIALS 0021-76908
APPLIED MATERIALS 0200-76041
APPLIED MATERIALS 0021-76908
APTech AP3800S MV8 MV8 00
APTech AP3800S MV8 MV8 MB
BTU INTERNATIo
nAL 5097614, Photozelle EM/RCV Paar Thruebeam
APPLIED MATERIALS 0021-37297, CAP VIEW LID 300mm
APPLIED MATERIALS 0021-37297, CAP VIEW LID 300mm
307968-001 , pressure valve
Celerity Manometer 01-0139-F, 1 to 4 bar/ -30 to 60 psi
TEL (TOKYO ELECTRON)5002-400078-11 308366431, Rolle
RIGAKU BZ-2RW82-J
APPLIED MATERIALS 3300-03613, FTG Schlauchverbindung 1/2h x1/2MNPT SST
Edwards C10517401, NW50 Spannring / clamping ring ST,
INFICON BP226882-T , Spannpratze DN160-250 ISO-K
ABB 261GS6505025784,261GS FJP821
ABB 261AS6505002205,261AS LKPN21
ABB AF185-30-22
ABB, GJM2550001R0029
ABB E233-12/48
ABB S202/B10
ABB S201P/C6
ABB S203/K10A
ABB S201P/K16A
ABB 5070/T2
ABB S203/C10
ABB S201P/K2A
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